ECEn 450/452
Semiconductor
Devices
Winter 2012
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ECEn Department | College of Engineering | BYU
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Aaron Hawkins |
Jim Fraser |
Shiul
Khadka Teaching Assistant 450 Assistance and Grading kay.ceeul@gmail.com |
Ben Tsai Teaching Assistant 452 Labs l2112ben@yahoo.com.tw |
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Monday |
Tuesday |
Wednesday |
Thursday |
Friday |
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8:00 am |
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9:00 am |
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10:00 am |
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11:00 am |
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Devotional |
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12:00 am |
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450 Class – 254 CB |
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450 Class – 254 CB | |
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1:00 pm |
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Hawkins Office Hour ( |
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2:00 pm |
452 Group 1 (487 CB) |
452 Group 3 (487 CB) |
452 Group 5 (487 CB) |
452 Group 7 (487 CB) |
45487 CB) |
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3:00 pm |
452 Group 1 (487 CB) |
452 Group 2 (487 CB) |
452 Group 3 (487 CB) |
452 Group 4 (487 CB) |
452 Group 5 (487 CB) |
452 Group 6 (487 CB) |
452 Group 7 (487 CB) |
452 Group 8 (487 CB) |
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4:00 pm |
452 Group 1 (487 CB) |
452 Group 2 (487 CB) |
452 Group 3 (487 CB) | 452 Group 4 (487 CB) |
452 Group 5 (487 CB) |
452 Group 6 (487 CB) |
452 Group 7 (487 CB) |
452 Group 8 (487 CB) |
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5:00 pm |
452 Group 2 (487 CB) |
TA Help 385 CB | 452 Group 4 (487 CB) |
452 Group 6 (487 CB) |
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452 Group 8 (487 CB) |
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Top of Page | ECEn Department | College of Engineering | BYU
S.M. Sze, Semiconductor Devices, Physics and Technology - 2nd Edition, John Wiley & Sons, 2002, ISBN 0-471-33372-7.
The prerequisites for this course are Math 113, Physics 220, and Physics 281 - or equivalent classes. If you have questions relating to your eligibility, please see the instructor.
This class will require some mathematical maturity in algebra, integral and differential calculus, and some fundamental knowledge of solid-state physics.
Welcome to Semiconductor Devices, and to what will be a fun and intriguing adventure! Semiconductor devices have become the basis for modern electronics so understanding them is critical. Advances in these devices really set the pace for development in other fields - especially within electrical engineering. Even outside of EE, smaller, faster, and lower-power devices make possible greater computing and communication capability - impacting nearly every aspect of our lives. There are many opportunities to work directly with semiconductor devices in industry and in research institutions. Many of the world's largest companies like IBM, Intel, and Motorola build their own circuits using semiconductors. There are also a large number of small and medium sized companies you have probably never heard of doing the same thing. There is even a whole business category that has been created that simply supports the semiconductor industry consisting of companies like Applied Materials, Novellus, and Lam Research. Because of their broad influence, even if you do not work directly with semiconductors, understanding how they work will be beneficial in whatever field you pursue in the future.
This webpage actually serves as the home of two courses, ECEn 450 and ECEn 452. ECEn 450 is the three credit hour classroom based course describing the physics and design of semiconductor devices. ECEn 452 is the one credit hour lab course meant to compliment ECEn 450, which takes place in the cleanroom on the 4th floor of the Clyde Building.
ECEn 450 will be structured to emphasize both how semiconductor devices work and how they are built. Each week there will be two lectures focused on the physics and numerical characterizations behind modern devices. The third lecture will concentrate specifically on fabrication technologies and how devices and circuits are constructed from raw materials. Much of the material presented in ECEn 450 will be brand new to students - this will be especially true for the fabrication technology sections. It should provide an exciting look into the world of semiconductors. Because the field is actually quite broad, much of the course will be devoted to the MOSFET which has become the most widely used device in the world - by far. The sequence of the course is meant to compliment the ECEn 452 laboratory course and every attempt has been made to cover material in the lecture classes before they are encountered in the lab.
ECEn 452 is usually taken in conjunction with ECEn 450. Although ECEn 450 can be taken without the laboratory class, participation in ECE 452 is encouraged. It will provide a unique and hands-on experience to build semiconductor devices "from scratch." You will also be exposed the the equipment and procedures found in a typical cleanroom. Most students report their experience in ECEn 450 as the most fun they have ever had in a laboratory setting. Really, taking ECEn 450 without ECEn 452 is a little like taking a cooking class without ever going into the kitchen.
Final grades for ECEn 450 will be based on the following distribution:
Homework 35% Oral Report 5% Midterm 1 20% Midterm 2 20% Final 20%
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Homework assignments will be placed on the web. You should check this site regularly for updated information. Homework is due at 11:59 pm on Tuesday, in the box marked ECEn 450, outside CB 413. The solution to the homework will be posted on the web, immediately after it is due. Because the homework solutions will be posted this way, late homework will not be accepted, no exceptions. Cooperative group study on the homework is encouraged, but simply copying someone else's work is unethical and will leave the student unprepared for exams. Much insight can be gained by studying with one or more groups, if you discipline yourself to find your own solutions first before comparing results. Rely on other's help only when you have exhausted all of your own ideas or have made no progress for 15 or 20 minutes. Remember, the exams will be totally your own work and constitute the greater portion of the grade. One of the biggest contributor to excessive time spent on homework is failure to read the text material for understanding prior to attempting problems. The text is thorough and well written; take advantage of it! Some questions have answers printed in the back of your text to serve as checkpoints. Remember that you are studying to be professional engineers and will be paid to solve problems without known solutions. Not only will no one give you the answers, but you will be the expert expected to know if the solution is correct. That is why it is important to solve many of our homework problems "blind," without a published answer. Questions on homework grading should first be addressed to the TA who grades the homework. Unresolvable differences may be discussed with the professor during office hours. Oral ReportsEach student in ECE450 will be involved in presenting a 5 minute oral report to the class. The topics for these reports are found in the Schedule and Assignments section below. These reports will be given at the beginning of Monday lectures. It is very important for them to begin on time and last NO MORE than 5 minutes. This is intended to give you some valuable experience in technical presentation in which it is important for you to stay under an allotted time. These reports are also to help us all understand some of the important characters behind the development of semiconductor devices. The intent is not to outline discoveries they made (that will be done in class) but to help us understand who these people were and how they discovered what they did. What motivated them? Did they set out to make a discovery or was it by accident? For those of you who undertake a report on the three companies on the list, you should report on how they were formed, what they did, what made them successful, and where are they now. In making presentations you are welcome to use Powerpoint, overhead slides, or whatever media you would like to effectively convey your message in a timely matter (5 minutes). You can link to some examples of Powerpoint presentations used in the past for these reports here: Oral Report Example 1 and Oral Report Example 2. Both of these examples are too long to fit within the 5 minute presentation timeframe, but they do contain the kinds of interesting information everyone in the class will want to see. Midterm ExamsWe will have two midterm exams. Final ExamTest will be administered in the testing center from April 14-19. Laboratory - ECEn 452The lab meets at a fixed time in room 487 of the Clyde Building and is divided into eight groups. The times for the eight groups are shown in the schedule at the top of the page. The first day of 450, we may try to adjust some of the lab groups so we don't have any with just a couple of people in them. Jim Fraser will supervise and assist you with the lab along with a student TA. This is a closed lab so it is expected that you will finish all of your work in the allotted time. Grades for ECEn 452 will be based on three factors. The first will be your lab notebook. Cleanroom compatible notebooks will be available for purchase in the EE Shop (416 CB). Each week's lab activities will include pre-lab questions you will be required to answer in your lab notebook. In addition you will be expected to fill out your lab notebook during the lab period and turn it in at the close of the period. The TA will grade your notebooks each week including the prelab assignments as well as how thoroughly you documented your activities. Some guidelines will be given for lab notebooks during the first lab session. The second and third factors to go into your lab grade will be two lab reports. One lab report will be due midway through the semester and the other at the end of the semester. These will summarize your activities and measurements in the lab. While everyone must turn in their own notebook each week, the lab reports will be written as a group and each group will submit two reports (one at the midway point and one at the end of the semester). The notebooks and lab reports will all be weighted equally when determining your grade.
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Honor Code.I expect you to live the honor code. Cheating of any kind will result in a failing grade in the course. Calculators.You will find a good scientific calculator extremely useful during your engineering career. The minimum recommended calculator must have trig, log, root, and exponential functions. Preparation for Lectures.Reading assignments will be given, and students are expected to come to class having completed the assigned reading. Students may be called on randomly to demonstrate their knowledge of the material by working problems on the board to assist the class in understanding the current discussion topic. The assigned reading pages for each day of lecture are listed below in the lecture schedule. Preparation for Exams.If you would like to do well on exams, I suggest that you do the
following: Preventing Sexual Harassment.Title IX of the Educational Amendment of 1972 prohibits sex discrimination against any participants in an educational program or activity that receives federal funds. The act is intended to eliminate sex discrimination in education. Title IX covers discrimination in programs, admissions, activities, and student-to-student sexual harassment. BYU's policy against sexual harassment extends not only to employees of the university but to students as well. If you encounter unlawful sexual harassment or gender based discrimination, please talk to your professor; contact the Equal Employment Office at 378-5895 or 367-5689 (24-hour); or contact the Honor Code Office at 378-2847. Students with Disabilities.Brigham Young University is committed to providing a working and learning atmosphere which reasonably accommodates qualified persons with disabilities. If you have any disability which may impair your ability to complete this course successfully, please contact the Services for Students with Disabilities Office (378-2767). Reasonable academic accommodations are reviewed for all students who have qualified documented disabilities. Services are coordinated with the student and instructor by the SSD Office. If you need assistance or if you feel you have been unlawfully discriminated against on the basis of disability, you may seek resolution through established grievance policy and procedures. You should contact the Equal Employment Office at 378-5895, D-282 ASB. |
Top of Page | ECEn Department | College of Engineering | BYU
ECEn 450
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Week |
Date |
Device Physics Topics |
Reading |
Processing Topics | Reading |
Homework |
Solutions |
Due |
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1 |
1/4-1/6 |
Introduction, Semiconductors (1X) |
Chap 1 - 2 (pp. 1-19) |
Crystal Growth | Chap. 10 (pp. 332 - 343) | Homework #1 | Solutions #1 |
1/10 |
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2 |
1/9-1/13 |
Crystal Structure and Energy Bands (2X) |
Chap 2 (pp. 19-34) |
Optical Lithography | Chap. 12 (pp. 404 - 418) | Solutions #2 |
1/17 |
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3 |
1/18-1/20 |
Donors and Acceptors (1X) |
Chap 2. (pp. 34-44) |
Wet Etching | Chap. 12 (pp. 426 - 431) | Homework #3 | Solutions #3 |
1/24 |
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4 |
1/23-1/27 |
Drift and Diffusion |
Chap 3 (pp. 47-60) |
Metallization | Chap. 11 (pp. 390-400) | Homework #4 | Solutions #4 |
1/31 |
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5 |
1/30-2/3 |
Generation/ Recombination |
Chap 3 (pp. 60-72) |
Thermal Oxidation | Chap. 11 (pp. 369-378) | Homework #5 | Solutions #5 |
2/7 |
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6 |
2/6-2/10 |
High Field/P-N Junction |
Chap 3 (pp. 73-80) Chap 4 (pp. 84-93) |
Dielectric / Polysilicon Deposition | Chap. 11 (pp. 378-390) | Homework #6 | Solutions #6 |
2/14 |
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7 |
2/13-2/17 |
Depletion |
Chap 4 (pp. 93-104) |
Basic Diffusion Process | Chap. 13 (pp. 452-462) | Homework #7 | Solutions #7 |
2/22 |
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8 |
2/21-2/24 |
Current vs. Voltage Characteristics |
Chap 4 (pp. 104-127) |
Ion Implants | Chap 13 (pp. 469-477) | Homework #8 | Solutions #8 |
2/28 |
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9 |
2/27-3/2 |
Metal/Semiconductor Contacts |
Ch 3 (pp 72-75) Ch 7 (pp 225-237) | Implant Damage and Annealing | Chap 13 (pp. 477-485) | Homework #9 | Solutions #9 |
3/6 |
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10 |
3/5-3/9 |
MOS Diode |
Chap 6 (pp. 169-186) |
Dry Etching | Chap. 12 (pp. 431-443) | Homework #10 | Solutions #10 |
3/13 |
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11 |
3/12-3/16 |
MOSFET Fundamentals |
Chap 6 (pp. 186-199) |
Next Generation Optical Lithography | Chap. 12 (pp. 418 - 426) | Homework #11 | Solutions #11 |
3/20 |
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12 |
3/19-3/23 |
MOSFET Scaling |
Chap 6 (pp. 199-205) |
Epitaxy | Chap. 10 (pp 354-365) | Homework #12 | Solutions #12 |
3/27 |
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13 |
3/26-3/30 |
CMOS |
Chap 6 (pp. 205-209) | Passive Components | Chap 14 (pp. 489-496) | Homework #13 | Solutions #13 |
4/3 |
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14 |
4/2-4/6 |
Memory Structures |
Chap 6 (pp. 209-220) |
MOSFET Technology | Chap 14 (pp. 503-519) | Homework #14 | Solutions #14 |
4/10 |
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15 |
4/9 - 4/11 |
Memory Structures and New Devices |
Chap 6 (pp. 209-220) |
Click on the Homework assignment for a copy in PDF format. Click on the solution for a copy in PDF format. The homework solutions are given to you as a learning aid. Please do not deprive future students of the opportunity to struggle with these problems and learn from them by copying and distributing solutions. I consider printing these solutions as a violation of the honor code. Please restrict yourself to viewing them on-line. Remember, education is not about getting grades, its about learning to think! All documents are in PDF format. You will need the Adobe Acrobat Reader to view them. To download a free copy of Adobe Acrobat Reader, click here.
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Date |
Oral Report Topic |
Group Members |
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1/23 |
Jan Czochralski | Darren Herbst, Jon Keller, David McKinlay |
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1/30 |
Ludwig Boltzmann | Matthew Morin, Bibek Uprety, Clayton Anderson, |
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2/6 |
Edwin Hall | Scott Hampshire, Malcolm Plessinger, Sadek Sabbah |
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2/13 |
Michael Faraday | William Jacobs, Griffin Kennedy, Thomas Nielson, Walter Portillo |
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2/21 |
Max Planck | David Gulbransen, YaeJi Lim, Greg Loveland |
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2/27 |
William Shockley | Russell Cannon, Niraj Chaulagain, David Landry |
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3/5 |
Jack Kilby | Nicolas Langlois, Zachary Vogel, Meagan Bracken, Cyrus Fox |
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3/12 |
Ted Hoff | Jason Moore, Reed Stout, Jacob Young |
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3/19 |
Fairchild Semiconductor | Merete Capener, Sara Ehlert, Nicholas Gleave |
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3/26 |
Texas Instruments | Ryan Marelli, Kelsey Wooley |
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4/2 |
Intel Corp. | Joseph Badal, Philip Cho, Sampo Hynynen |
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4/9 |
Micron Corp. | Tyler Jorden, Stephen Ross, Brian Thrap |
ECEn 452 Outline
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Week |
Laboratory Topic |
Activity | Backgound Reading | Lab Objectives |
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1 |
Safety in cleanroom | Orientation and Safety tests | ||
| Semiconductors, Metals, Oxides | ||||
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2 |
Cleanroom Classification Metal Deposition/Vacuum Systems | Measure particle counts in and out of cleanroom. Deposit Al and Ni on a wafer using evaporators | Week 2 | Week 2 |
| 3 | Lithography | Develop lithography recipes | Week 3 | Week 3 |
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4 |
Wet Etching/Annealing | Etch TLM patterns into metal on Si, anneal metal patterns | Week 4 | Week 4 |
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5 |
Contact Resistance | Measure contact resistance for aluminum patterns annealed differently | Week 5 | Week 5 |
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6 |
Oxide Growth and Characterization | Grow 520 nm of thermal oxide and measure | Week 6 | Week 6 |
| 7 | Lithographic Alignment | Create a full color picture using dielectric films | Week 7 | Week 7 |
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MOSFET | |||
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8 |
Oxide Etching/Doping | Etch drain and source, dope regions | Week 8 | Week 8 |
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9 |
Mask Alignment/Gate Oxide | Align and etch for gate oxide, grow gate oxide | Week 9 | Week 9 |
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10 |
Source and Drain/Contacts | Etch and anneal metal contacts | Week 10 | Week 10 |
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11 |
Metal Anneal | Backside Contact and Metal Anneal | Week 11 | Week 11 |
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12 |
MOSFET Characterization | Measure MOSFET parameters | Week 12 | Week 12 |
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13 |
MOSFET Characterization | Measure MOSFET parameters | ||
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14 |
Labs will begin the week of January 10 - 14. Your first lab session will take place in room 435 of the Clyde Building (the ECE secondary conference room) at 3 pm on the weekday you would typically have labs. During this first session we will go over lab reporting requirements, how to gain access to the cleanroom, and mandatory safety information. After the first week, lab groups will meet in the cleanroom at their scheduled time.
Lab Groups:
Monday
| Group 1 | Group 2 |
| Darren Herbst | Clayton Anderson |
| Jon Keller | Scott Hampshire |
| David McKinlay | Malcolm Plessinger |
| Matthew Morin | Sadek Sabbah |
| Bibek Uprety | Sushant Shrestha |
Tuesday
| Group 3 | Group 4 |
| William Jacobs | David Gulbransen |
| Griffin Kennedy | YaeJi Lim |
| Thomas Nielson | Gregory Loveland |
| Walter Portillo | |
Wednesday
| Group 5 | Group 6 |
| Russell Cannon | Meagan Bracken |
| Niraj Chaulagain | Cyrus Fox |
| David Landry | Jason Moore |
| Nicolas Langlois | Reed Stout |
| Zachary Vogel | Jacob Young |
Thursday
| Group 7 | Group 8 |
| Merete Capener | |
| Sara Ehlert | |
| Nicholas Gleave | |
| Ryan Marelli | |
| Kelsey Wooley |
Lab Reports: ECEn452 will require each lab group to turn in two lab reports describing the two major lab topics (Semiconductors/Metals/Oxides and MOSFETs). These lab reports will be due on March 21st and April 13th respectively. Please email these reports as a WORD or Acrobat file to hawkins@ee.byu.edu. The following document provides a description for the requested format to these reports: Lab Reports. Please see the instructor with any questions you might have on this assignment. If you click on the following links, you will see the two example lab reports from the previous year. I expect the quality of these reports to continue to increase. Lab Report Example 1 and Lab Report Example 2.
Top of Page | ECEn Department | College of Engineering | BYU
Midterm 1, February 3-7, testing center
Midterm 2, March 9-13, testing center
Final Exam, April 14-19,
testing center
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of Page | ECEn
Department | College
of Engineering | BYU